Spheryx Presents Paper on Characterization of Large Particle Contaminants in CMP Slurries at International Conference on Planarization/CMP Technology 2018

NEW YORK, Oct. 15, 2018 /PRNewswire/ -- Spheryx announces the presentation of a paper entitled "Holographic Characterization of Agglomerates in CMP Slurries" at the International Conference on Planarization/CMP Technology (ICPT) 2018. The conference is focused on chemical mechanical planarization (CMP), one of the most important processes in semiconductor manufacturing, and draws attendees from around the world to address current challenges in the semiconductor industry. The paper will be presented by Dr. Fook Chiong Cheong (Chief Technology Officer, Spheryx, Inc.) at 9:40 am October 16, 2018 in Geomungo Hall, K Hotel, Seoul, Republic of Korea.  This work also will be published in the conference proceedings.  Dr. Cheong's co-authors are Priya Kasimbeg, Annemarie Winters, Jaroslaw M. Blusewicz, Ei-Hnin Hlaing, David B. Ruffner, Laura A. Philips, all of Spheryx, Robin V. Ihnfeldt, President, General Engineering and Research, and David G. Grier, Professor of Physics, New York University.

The paper discusses the application of Spheryx's proprietary Total Holographic Characterization^® to measure the concentration of agglomerates in CMP slurries, to distinguish dense compact agglomerates from transient branched agglomerates, and to differentiate agglomerates from other contaminants such as oil droplets and polishing pad fragments.

About Spheryx, Inc.
Spheryx, Inc. is a privately held analytical services and instruments company providing Total Holographic Characterization^® of colloidal materials.  Spheryx's proprietary technology uses holographic video microscopy to characterize each particle in colloidal dispersions and multi-component colloidal mixtures, offering unprecedented insights into these materials' characteristics. Applications include R&D, quality assurance and manufacturing process control across a broad spectrum of industries, where characterization of colloids can enhance innovation, improve safety and reduce costs. For more information: https://www.spheryx.solutions/

Note: This news release contains forward-looking statements regarding future events. These statements are just predictions and are subject to risks and uncertainties that could cause the actual events or result to differ materially.

Contact:
Laura Philips, CEO
[email protected] 
607-738-0100

SOURCE Spheryx, Inc.

Related Links

http://www.spheryx.solutions

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