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Cymer Launches OnPulse™ Plus

OnPulse Enhancement to Enable Improvements in Fab Productivity and Wafer Quality


News provided by

Cymer, Inc.

Jul 11, 2011, 08:00 ET

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SAN DIEGO, July 11, 2011 /PRNewswire/ -- In advance of SEMICON West 2011, Cymer, Inc. (Nasdaq: CYMI), the world's leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced OnPulse Plus, an enhancement of Cymer's widely adopted OnPulse support products. OnPulse Plus provides real-time light source monitoring to help improve fab productivity and wafer quality in response to chipmakers' requirements for enabling data to monitor and optimize the performance of Argon Fluoride (ArF) and Krypton Fluoride (KrF) light sources to meet specific wafer fabrication requirements.

"In today's high productivity manufacturing environment, chipmakers' advanced lithography processes have increased sensitivity to lithography process variation," said Ed Brown, president and chief operating officer of Cymer. "As wafer value increases, more emphasis on performance monitoring is needed to ensure wafer quality and high yield.  With the data collection and analytical capability offered by OnPulse Plus, we are in a unique position to help our chipmaker customers minimize process variation and improve yield."

The first in a series of data-rich performance enhancement products Cymer will deliver to customers, OnPulse Plus will display, in real-time, light source performance data in a new user interface, supporting chipmaker needs to improve process control and the quality of wafers. Future enhancements will improve the data resolution and correlation of light source performance indicators at the wafer and die level. OnPulse Plus and follow-on products will leverage enabling technology acquired from Cymer's recent acquisition of eDiag Solutions.

OnPulse Plus reinforces Cymer's commitment to deliver ongoing value enhancement for new and previously installed light sources, building on the company's deep technical expertise and worldwide installed base support infrastructure. OnPulse Plus is now available for Cymer ArF and KrF light sources.

SEMICON West 2011 is held from July 12-14 at Moscone Center in San Francisco. Media interested in meeting with a Cymer representative are encouraged to contact Erin Coller at 619.234.0345 or [email protected].  

About Cymer

Cymer, Inc. is the market leader in developing light sources, used by chipmakers worldwide as the essential light source for DUV lithography systems. Cymer's light sources have been widely adopted by the world's top chipmakers and the company's installed base comprises approximately 3,750 systems. Continuing its legacy of leadership, Cymer is currently pioneering the industry's transition to EUV lithography, the next viable step on the technology roadmap for the creation of smaller, faster chips. The company is headquartered in San Diego, and supports its customers from numerous offices around the globe. Cymer maintains a website to which it regularly posts press releases, SEC filings, and additional information about the company. Interested persons can also subscribe to automated e-mail alerts or RSS feeds. Please visit www.cymer.com for additional information.

Forward Looking Statements

Statements in this press release that are not strictly historical in nature are forward-looking statements. These statements include, but are not limited to statements regarding the intended benefits of OnPulse Plus and the introduction of future data enhancement products and their intended benefits. These statements are predictions based on current information and expectations and involve a number of risks and uncertainties. Actual events or results may differ materially from those projected in any of such statements due to various factors, including but not limited to: the performance and market acceptance of the company's new products or technologies; new and enhanced product offerings by competitors; the company's ability to meet its production and product development schedules; and the rate at which semiconductor manufacturers adopt new technologies. For a discussion of these and other factors which may cause our actual events or results to differ from those projected, please refer to the company's most recent annual report on Form 10-K and quarterly reports on Form 10-Q, as well as other subsequent filings with the Securities and Exchange Commission (SEC). You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this press release. All forward-looking statements are qualified in their entirety by this cautionary statement, and the company undertakes no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this press release.

Cymer and all other Cymer product or service names used herein are either registered trademarks or trademarks of Cymer, Inc. Any other marks mentioned herein are the property of their respective holders.

SOURCE Cymer, Inc.

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