NEW YORK, Feb. 4 /PRNewswire/ -- Reportlinker.com announces that a new market research report is available in its catalogue:
http://www.reportlinker.com/p0175854/Atomic-Layer-Deposition.html
THIS REPORT:
Provides information on the basic atomic layer deposition (ALD) process, with its variants and upgrades, focusing on raw materials and equipment used
Identifies various types of precursors and production systems, determines their current market status, defines trends, and presents forecasts of growth, with data for 2008, estimates for 2009, and compound annual growth rates (CAGRs) through 2014
Discusses technological issues, including the latest process developments, and compares them with alternative thin film methods
Analyzes the ALD industry on a worldwide basis from the standpoint of both manufacturing and consumption
Supplies a detailed description of current and potential applications of ALD technology
Examines commercial and public research activities in major regions of the world.
Chapter- 1: INTRODUCTION -- Complimentary
STUDY GOALS AND OBJECTIVES 1
REASONS FOR DOING THIS STUDY 2
INTENDED AUDIENCE 2
SCOPE OF REPORT 3
METHODOLOGY AND INFORMATION SOURCES 4
RELATED BCC RESEARCH STUDIES 5
ANALYST CREDENTIALS 6
BCC ONLINE SERVICES 7
DISCLAIMER 7
Chapter-2: EXECUTIVE SUMMARY
EXECUTIVE SUMMARY 8
SUMMARY TABLE GLOBAL ATOMIC LAYER DEPOSITION MARKET, THROUGH 2014 ($ MILLIONS) 9
SUMMARY FIGURE GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005–2014 ($ MILLIONS) 10
Chapter-3: OVERVIEW
INTRODUCTION 11
THIN FILMS, NANOFILMS, AND ALD FILMS 11
TABLE 1 THIN FILM TECHNOLOGIES, 2009 12
TABLE 1 (CONTINUED) 13
TABLE 1 (CONTINUED) 14
FIGURE 1 THIN FILM METHODS (EQUIPMENT, MATERIALS, AND SERVICES): GLOBAL MARKET SHARE BY GROUP OF TECHNOLOGIES, 2008 (%) 15
REVIEW OF THE HISTORY OF ATOMIC LAYER DEPOSITION AND RECENT EVENTS 15
TABLE 2 ATOMIC LAYER DEPOSITION—TECHNOLOGICAL MILESTONES 16
FIGURE 2 ATOMIC LAYER DEPOSITION—WORLDWIDE PATENT APPLICATIONS AND PATENTS ISSUED, 1990–2008 17
CURRENT AND EMERGING APPLICATIONS FOR ATOMIC LAYER DEPOSITION 17
TABLE 3 ALD FILMS AND APPLICATIONS, 2009 18
TABLE 3 (CONTINUED) 19
TABLE 3 (CONTINUED) 20
TABLE 3 (CONTINUED) 21
ELECTRONICS 22
Established Applications 22
Semiconductor Devices 22
Passive Components and Embedded Devices 22
Recording Heads 22
Optoelectronic Devices 22
Advanced Displays 23
Emerging Applications 23
TABLE 4 ALD APPLICATIONS IN ELECTRONICS, 2009 24
MECHANICAL/CHEMICAL 25
Established Applications 25
Wear and Corrosion Resistant Coatings 25
MEMS and MOEMS 25
Sensors 25
Particle Coatings 25
Catalysts and Membranes 26
Emerging Applications 26
TABLE 5 ALD APPLICATIONS IN THE MECHANICAL/CHEMICAL SECTOR, 2009 26
TABLE 5 (CONTINUED) 27
ENERGY 27
Established Applications 27
Photovoltaic Cells and Photothermal Coatings 27
High Temperature Superconductors 27
Solid Oxide Fuel Cells 28
Batteries 28
Emerging Applications 28
TABLE 6 ALD APPLICATIONS IN THE ENERGY SECTOR, 2009 28
OPTICS 29
Established Applications 29
Optical Coatings 29
X-ray Diffraction Devices 29
Emerging Applications 29
TABLE 7 ALD APPLICATIONS IN OPTICS, 2009 30
MEDICAL/BIOLOGICAL/DENTAL 30
Established Applications 30
Biocompatible Coatings 30
Emerging Applications 30
TABLE 8 ALD APPLICATIONS IN THE MEDICAL/BIOLOGICAL/DENTAL SECTOR, 2009 31
NANOTECHNOLOGY 31
Established Applications 31
Nanoparticles 31
Nanowires 31
Nanotubes 31
Nanolaminates and Nanocomposites 32
Emerging Applications 32
TABLE 9 ALD APPLICATIONS IN NANOTECHNOLOGY, 2009 32
Chapter-4: GLOBAL MARKET
ALD MATERIALS AND EQUIPMENT—ANALYSIS OUTLINE 33
GLOBAL MARKET SUMMARY 33
GLOBAL MARKET SUMMARY (CONTINUED) 34
TABLE 10 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005 THROUGH 2014 ($ MILLIONS) 35
FIGURE 3 GLOBAL ATOMIC LAYER DEPOSITION MARKET, 2005–2014 ($ MILLIONS) 35
ALD MATERIALS 36
INTRODUCTION 36
METAL SOURCES 36
TABLE 11 METAL SOURCES, 2009 36
Earlier Metal Precursors 37
Current Technical Issues 38
Latest Technological Developments, 2006 to Present 39
Metal Beta-Ketoiminate and Beta-Diiminate Complexes 39
Diimine Copper Complexes 39
Precursors Containing Electron Donating Group-Substituted Alkenyl Ligands 40
Phosphoamidinate Precursors 40
Organometallic Precursors for High-Purity Metal Films 41
FUNCTIONAL GROUP SOURCES 41
Elemental Films Using Boron Compounds 42
INERT GASES 42
CURRENT MARKET STATUS 42
Current Market Summary 42
TABLE 12 GLOBAL MARKET FOR ALD MATERIALS, THROUGH 2009 ($ MILLIONS) 43
Revenues by Material Type 43
TABLE 13 ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, 2009 ($ MILLIONS/%) 44
TABLE 14 ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, 2009 ($ MILLIONS/%) 45
FIGURE 4 ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2009 (%) 45
Revenues by Application 45
TABLE 15 ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%) 46
FIGURE 5 ALD MATERIALS: MARKET SHARE BY APPLICATION, 2009 (%) 46
TABLE 16 ALD PRECURSORS FOR SEMICONDUCTOR DEVICES: GLOBAL REVENUES BY FUNCTION, 2009 ($ MILLIONS/%) 47
Revenues by Region 47
TABLE 17 ALD MATERIALS: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS) 48
FIGURE 6 ALD MATERIALS: MARKET SHARE BY REGION, 2009 (%) 49
ALD EQUIPMENT AND TECHNOLOGIES 49
EXISTING TECHNOLOGIES 49
TABLE 18 ALD TECHNOLOGIES 50
LATEST TECHNOLOGICAL DEVELOPMENTS, 2006 TO PRESENT 51
Rapid Vapor Deposition ALD 51
Variable Temperature and Dose Atomic Layer Deposition 51
Microwave-aided ALD 52
Hybrid Chemical Vapor Deposition 53
Field-aided Preferential Deposition 53
CURRENT MARKET STATUS 54
Current Market Summary 54
TABLE 19 GLOBAL MARKET FOR ALD EQUIPMENT, THROUGH 2009 ($ MILLIONS) 55
Revenues by Equipment Type 55
TABLE 20 ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, 2009 ($ MILLIONS/%) 56
FIGURE 7 ALD EQUIPMENT: MARKET SHARE BY TYPE, 2009 (%) 57
Revenues by Application 57
TABLE 21 ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2009 ($ MILLIONS/%) 58
FIGURE 8 ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2009 (%) 58
Revenues by Region 58
TABLE 22 ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2009 ($ MILLIONS) 59
FIGURE 9 ALD EQUIPMENT: MARKET SHARE BY REGION, 2009 (%) 59
FIGURE 9 (CONTINUED) 60
MARKET GROWTH TRENDS 60
INDUSTRY GROWTH AND TECHNOLOGICAL TRENDS 60
Semiconductor Devices 60
Industry Growth 60
TABLE 23 FORECAST—SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2014 ($ BILLIONS) 61
Technological Trends 61
TABLE 24 IC CONFIGURATIONS, 2006-2015 61
Magnetic Recording Media 62
Industry Growth 62
TABLE 25 FORECAST—HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS) 63
FIGURE 10 FORECAST—HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2014 (%) 63
TABLE 26 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2014 (MILLION UNITS) 64
FIGURE 11 FORECAST—HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2009 AND 2014 (MILLION UNITS) 64
FIGURE 12 FORECAST—HARD DISKS: PRODUCTION SHARE BY TYPE, 2014 (%) 65
Technological Trends 65
Advanced Displays 66
Industry Growth 66
TABLE 27 FORECAST—ADVANCED DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ BILLIONS) 66
Technological Trends 67
New Films 67
Roll-to-roll and Large Area Coatings 67
Other Applications 68
EQUIPMENT UPGRADES 69
NANOTECHNOLOGY AND OTHER TECHNOLOGICAL FACTORS 69
Nanotechnology 69
TABLE 28 THE NANOTECHNOLOGY INDUSTRY 70
TABLE 29 NANOTECHNOLOGY: GLOBAL REVENUES BY SEGMENT, THROUGH 2014 ($ BILLIONS) 71
Comparison with Alternative Technologies 71
TABLE 30 DEPOSITION METHODS FOR NANOFILMS 71
TABLE 30 (CONTINUED) 72
New Product Development 72
New Generation of Composite Materials 73
REGIONAL TRENDS 73
PROJECTED ATOMIC LAYER DEPOSITION MARKET 74
KEY OBSERVATIONS 74
TABLE 31 FACTORS AFFECTING SALES OF ALD PRECURSORS AND EQUIPMENT, 2010-2014 74
ALD MATERIALS MARKET FORECAST 75
Revenues by Material Type 75
TABLE 32 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY PRECURSOR TYPE, THROUGH 2014 ($ MILLIONS) 76
TABLE 33 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY FILM TYPE, THROUGH 2014 ($ MILLIONS) 77
FIGURE 13 FORECAST—ALD MATERIALS: MARKET SHARE BY FILM TYPE, 2014 (%) 77
Revenues by Application 78
TABLE 34 FORECAST—ALD MATERIALS: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS) 79
FIGURE 14 FORECAST—ALD MATERIALS: MARKET SHARE BY APPLICATION, 2014 (%) 79
TABLE 35 FORECAST—ALD PRECURSORS FOR SEMICONDUCTOR DEVICES: GLOBAL REVENUES BY FUNCTION, THROUGH 2014 ($ MILLIONS) 80
Revenues by Region 80
TABLE 36 FORECAST—ALD MATERIALS: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS) 81
FIGURE 15 FORECAST—ALD MATERIALS: MARKET SHARE BY REGION, 2014 (%) 82
ALD EQUIPMENT MARKET FORECAST 82
Revenues by Equipment Type 82
TABLE 37 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2014 ($ MILLIONS) 83
FIGURE 16 FORECAST—ALD EQUIPMENT: MARKET SHARE BY TYPE, 2014 (%) 84
Revenues by Application 84
TABLE 38 FORECAST—ALD EQUIPMENT: GLOBAL REVENUES BY APPLICATION, THROUGH 2014 ($ MILLIONS) 85
FIGURE 17 FORECAST—ALD EQUIPMENT: MARKET SHARE BY APPLICATION, 2014 (%) 85
Revenues by Region 86
TABLE 39 FORECAST—ALD EQUIPMENT: REVENUES BY REGION, THROUGH 2014 ($ MILLIONS) 86
FIGURE 18 FORECAST—ALD EQUIPMENT: MARKET SHARE BY REGION, 2014 (%) 87
Chapter-5: GLOBAL INDUSTRY STRUCTURE
GLOBAL INDUSTRY STRUCTURE 88
MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT 89
TABLE 40 MANUFACTURERS OF ALD MATERIALS AND EQUIPMENT 89
TABLE 40 (CONTINUED) 90
FIGURE 19 ALD MANUFACTURERS: DISTRIBUTION BY SIZE, 2009 (NUMBER OF COMPANIES) 91
TABLE 41 ALD MANUFACTURERS: DISTRIBUTION BY REGION, 2005 AND 2009 (NUMBER OF COMPANIES) 92
TABLE 42 NOTABLE INDUSTRY CHANGES SINCE 2005 92
OTHER PLAYERS IN THE ALD INDUSTRY 93
TABLE 43 OTHER RELEVANT INDUSTRY PLAYERS 93
ATOMIC LAYER DEPOSITION PRODUCTION BY REGION 93
TABLE 44 ALD PRODUCTION BY REGION, 2007–2014 (PERCENT OF SALES) 94
ATOMIC LAYER DEPOSITION CONSUMPTION BY REGION 94
TABLE 45 ALD CONSUMPTION BY REGION, 2007–2014 (PERCENT OF SALES) 95
COMPANY PROFILES 95
ADEKA 96
AIR LIQUIDE 96
AIR PRODUCTS AND CHEMICALS 97
AIXTRON 98
AKZO NOBEL 99
APPLIED MATERIALS 99
ASM INTERNATIONAL 100
ASM International (Continued) 101
ATMI 102
BENEQ 102
Beneq (Continued) 103
CAMBRIDGE NANOTECH 104
H. C. STARCK 105
HITACHI KOKUSAI ELECTRIC 105
INTEGRATED PROCESS SYSTEMS 106
JOHNSON MATTHEY 107
JUSUNG ENGINEERING 107
KURT J. LESKER 108
LINDE 109
NOVELLUS SYSTEMS 110
OXFORD INSTRUMENTS 111
PICOSUN 112
PRAXAIR 113
ROHM AND HAAS 114
SHIN-ETSU CHEMICAL 115
SIGMA-ALDRICH 115
Sigma-Aldrich (Continued) 116
TEGAL 117
TOP PLAYERS MARKET SHARE 117
FIGURE 20 ATOMIC LAYER DEPOSITION—TOP 25 MANUFACTURERS BY REGION, 2009 (%) 118
TABLE 46 ALD MATERIALS—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES) 119
TABLE 47 ALD EQUIPMENT—MARKET SHARE OF TOP FIVE MANUFACTURERS, 2009 (PERCENT OF TOTAL SALES) 119
Chapter-6: INDUSTRY COMPETITIVENESS
ALD DEVELOPMENT ACTIVITIES 120
TABLE 48 ORGANIZATIONS INVOLVED IN ALD RESEARCH, WORLDWIDE 120
TABLE 48 (CONTINUED) 121
TABLE 48 (CONTINUED) 122
TABLE 48 (CONTINUED) 123
TABLE 48 (CONTINUED) 124
UNITED STATES 124
Albany Nanotech 124
TABLE 49 ALBANY NANOTECH RESEARCH 125
Argonne National Laboratory 125
TABLE 50 ARGONNE NATIONAL LABORATORY RESEARCH 126
Harvard University 126
TABLE 51 HARVARD UNIVERSITY RESEARCH 127
Stanford University 127
TABLE 52 STANFORD UNIVERSITY RESEARCH 128
SVTC Technologies 128
University of California, Los Angeles 129
TABLE 53 UCLA RESEARCH 130
University of Colorado at Boulder 130
TABLE 54 UNIVERSITY OF COLORADO AT BOULDER RESEARCH 131
EUROPE 131
Eindhoven University of Technology 131
TABLE 55 EINDHOVEN UNIVERSITY OF TECHNOLOGY RESEARCH 132
Helsinki University of Technology 132
TABLE 56 TKK RESEARCH 133
IMEC 133
TABLE 57 IMEC RESEARCH 134
University of Helsinki 134
TABLE 58 UNIVERSITY OF HELSINKI RESEARCH 135
ASIA PACIFIC 135
Korea Advanced Institute of Science and Technology 135
TABLE 59 KAIST RESEARCH 136
Semiconductor Leading Edge Technologies 136
SUMMARY OF GLOBAL R&D ACTIVITIES IN ALD TECHNOLOGY 136
Summary of Global …(Continued) 137
FIGURE 21 CURRENT GLOBAL ALD RESEARCH AND DEVELOPMENT BY SUBJECT (%) 138
OTHER CONSIDERATIONS 138
KEY GROWTH MARKETS 139
TABLE 60 GLOBAL GROWTH FORECAST FOR CURRENT AND POTENTIAL ALD APPLICATIONS, 2009–2014 139
DRIVING FORCES AND THEIR IMPACT ON MARKET GROWTH 140
TABLE 61 PERCENTAGE IMPACT OF MAJOR COMPETITIVE FACTORS ON THE GROWTH OF THE ALD MARKET, 2009–2014 141
Chapter-7: U.S. PATENT ANALYSIS
INTRODUCTION 142
SUMMARY OF PATENTS AWARDED DURING THE PERIOD 2007 THROUGH 2009 142
TABLE 62 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2009 143
TABLE 63 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2008 159
TABLE 64 ATOMIC LAYER DEPOSITION—U.S. PATENTS, 2007 173
GENERAL TRENDS 184
TABLE 65 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS, 2003–2009 185
FIGURE 22 ATOMIC LAYER DEPOSITION: U.S. PATENT TRENDS, 2003–2009 (NUMBER OF PATENTS) 185
TRENDS BY COUNTRY AND REGION 186
FIGURE 23 SHARES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION BY REGION, 2007–2009 (%) 186
FIGURE 24 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2007–2009 (%) 187
FIGURE 24 (CONTINUED) 188
FIGURE 25 ATOMIC LAYER DEPOSITION: PATENTS BY COUNTRY, 2003–2005 (NUMBER OF PATENTS) 189
TRENDS BY ASSIGNEE 189
TRENDS BY ASSIGNEE (CONTINUED) 190
TABLE 66 ASSIGNEES OF U.S. PATENTS RELATED TO ATOMIC LAYER DEPOSITION, 2007–2009 191
TABLE 66 (CONTINUED) 192
TABLE 66 (CONTINUED) 193
FIGURE 26 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY ORGANIZATION TYPE, 2007-2009 (%) 194
TRENDS BY PATENT CATEGORY 194
FIGURE 27 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY CATEGORY, 2007–2009 (%) 195
FIGURE 27 (CONTINUED) 196
TRENDS BY APPLICATION 196
FIGURE 28 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY APPLICATION, 2007–2009 (%) 197
TRENDS BY FILM TYPE 197
FIGURE 29 ATOMIC LAYER DEPOSITION: SHARES OF U.S. PATENTS BY FILM TYPE, 2007–2009 (%) 198
FIGURE 29 (CONTINUED) 199
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