Axcelis Announces Shipment Of First 'Purion VXE' To Leading Foundry

System for Next Gen R&D for Image Sensors to Support Mobile and IoT Market

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Oct 03, 2016, 08:00 ET

BEVERLY, Mass., Oct. 3, 2016 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received its first order for the Purion VXE™, a new extended energy range model of Axcelis' industry leading Purion XE™ high energy implanter. The new system delivers the highest energy range in the Purion platform. The customer plans to use the 300mm Purion VXE to support R&D for image sensors in the mobile and IoT markets. The system is scheduled to ship in the fourth quarter.

John Aldeborgh, executive vice president, customer operations, commented, "We're excited about the opportunity to provide this new model of the Purion XE platform to support the burgeoning image sensors and power device markets. The Purion EXE™ and VXE, provide the highest energy levels available in a production implanter, to perform ultra-high energy implants, with extremely precise and deep doping profiles." He added, "The Purion platform's common architecture, along with its industry leading LINAC technology, has allowed Axcelis to rapidly expand the capabilities of our high energy product line to meet the needs of customers' continually advancing technology."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

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